Research

Despite their important role of reactive plasmas for several technological applicaions, many basic penoman are not yet understood. A progress in this area and a more targeted development of new materials and future plasma processes requires a more detailed knowledge about the interaction between a reactive plasma with its surrounding surfaces.

The central topic of this research group is the investigation of basic reaction mechanisms at the interface plasma surface. The research on this topics can be summarized by posing two major questions:

• What are the hetreogeneous surface recations,
• which cause film depositon, etching or surface modification in a reactive plasmas?